| Part Number | Description | Add to Inquiry |
| 0010-02737 | ASSY, C-CHUCK, 200/150MM CIP99 |  |
| 0040-35132 | BASE PLATE EPi CHAMBER | |
| 0040-96169 | SHAFT/BELLOWS ASSEMBLY | |
| 0090-75000 | SENSOR ASSY LL DOOR | |
| 0190-35018 | BRG ANGULAR CONTACT SPECIAL | |
| 0190-35019 | Bearing 4-point Contact Special 6" | |
| 0190-38517 | HALOGEN LAMP 95V 640W, RTP Vantage | |
| 0200-00135 | Quartz Blade 200mm | |
| 0200-00207 | TIP SUSCEPTOR SHAFT OUTSIDE | |
| 0200-00412 | Susceptor Support Shaft | |
| 0200-05207 | Lower Dome | |
| 0200-10176 | QTZ SHADOW RING | |
| 0660-90093 | CARD,LOOP CONTROLLER | |
| 0200-35003 | Robot Blade 150mm | |
| 0200-35004 | 200mm Quartz blade | |
