| Tool Model | Description | Add to Inquiry |
| Retrofit ASM Furnace A400/A412 LP process | Nitride to POLY & POLY to Nitride |  |
| Retrofit ASM Furnace A400/A412 process | ATM type to LP type & LP type to ATM type | |
| Retrofit ASM Furnace A400/A412 ATM process | Low TEMP. to Hight TEMP | |
| Upgrade ASM EPITAXY E2000/E2000 plus process | ATM add RP function | |
