| Part Number | Description | Add to Inquiry |
| 0200-35423 | Wafer Lift Shaft 150mm |  |
| 0200-35424 | Wafer Lift Shaft 200mm | |
| 0200-35425 | Susceptor Support Shaft | |
| 0200-35688 | Lower Liner | |
| 0200-35692 | 200mm BLADE | |
| 0200-36118 | Edge Ring for Centura RTP | |
| 0200-36689 | RING FOCUS QUARTZ DPS POLY | |
| 0200-36727 | Susceptor W/O Center 200mm,EPI | |
| 0200-36762 | SUSCEPTOR R3 ROT 150MM EPI | |
| 0200-89004 | 300mm lower dome | |
| 0200-89023 | 300mm upper dome | |
| 3700-03163 | Seal Assy | |
| 3700-06217 | Seal Dynamic Radial | |
| 7400-0082-09 | M-Tray Slip Free Option | |
| 7400-0085-09 | Chamber w/baffle | |
