| Part Number | Description | Add to Inquiry |
| 02-326679D01 | ASSY-WAFER WAND-150MM (6") |  |
| 02-326680D01 | ASSY-WAFER WAND 200MM | |
| 02-329265D01 | ASSY CASSETTE 150MM High Temperature | |
| 02-332010D01 | ASSY-HARD DISK DRIVE-SCSI | |
| 02-336656-01 | PCB ASSY-FOXBORO-CTR W/FRMWR | |
| 02-336656-02 | PCB ASSY-FOXBORD-FR W/FRMWP | |
| 02-353013C01 | PRESSURE SWITCH 50 psi | |
| 03-321922D01 | PCB ASSY-LAMP CURRENT CHECK-TESTED | |
| 03-323690D01 | PCB ASSY-DC INTERLOCK-II-TESTED | |
| 03-329507-01 | PCB ASSY-TEMP CONT-I/O-ANALOG RATIO | |
| 04-321492A01 | KITS-EXHAUST FLANGE O-RING | |
| 04-332466-03 | SiC SQUARE RING SET (T&B) | |
| 04-333603A09 | KIT-EPROMS SYS V7.01 | |
| 04-337481-02 | KIT-68040-V7.30 EPI DISKS-HSMS | |
| 1055-335-01 | Bearing thin section 50.8SS | |
