| Part Number | Description | Add to Inquiry |
| 16-320037C01 | SCREW-BALL |  |
| 16-321366C01 | Bellows Weldment | |
| 16-321452B01 | FEEDGEAR-HUB ASSY | |
| 16-325425C01 | QTZ FOOT LEFT 125MM | |
| 16-325425C02 | QTZ FOOT RIGHT 125MM | |
| 16-325426C01 | QTZ FOOT LEFT 150MM | |
| 16-325426C02 | QTZ FOOT RIGHT 150MM | |
| 16-325427C01 | QTZ FOOT LEFT 200MM | |
| 16-325427C02 | QTZ FOOT RIGHT 200MM | |
| 16-328615D01-EXCHANGE | REFL-D-CENTER-UPR-LAMP ARRAY EXCHANGE | |
| 16-328615D02-EXCHANGE | CENTER UPPER REFLECTOR EXCHANGE Finish: Shiny | |
| 16-329280B04-R | ROD-SPACER-HIGH TEMP CASSETTE 200MM-REFUREB | |
| 16-332438D06 | 6" SiC Susceptor | |
| 16-336164D01-SQ | SUPPORT GETTER SQUARE CHAMBER OPEN | |
| 16-350563C01-SQ | PLATE GETTER | |
