| Part Number | Description | Add to Inquiry |
| 02-323029C05 | "Parts-0.5 psi Pressure Switch Hardware Type" |  |
| 02-323129D01 | ASSY-CA-LVC1 TO MFC INTERFACE | |
| 02-323304D01 | RP EXHAUST FLANGE KIT | |
| 02-323609C01 | ASSY-CA ROTATION ASSY BRKT TO MOTOR | |
| 02-323634C01 | ASSY-THERMOCOUPLE RETAINER | |
| 02-323740D01 | ASSY-INTERLOCK MODULE | |
| 02-323835D01 | Assy-VALVE PRESSURE BALANCE-LH | |
| 02-324555D01 | ASSY-WATER FLOW SWITCH | |
| 02-325252C01 | Assy-CA Loadlock1 Wafer Out Sensor (LT) | |
| 02-325252C02 | Assy-CA Loadlock2 Wafer Out Sensor (RT) | |
| 02-325853C01 | ASSY-TOOL-TACH MOUNT-ROUND CLAMP | |
| 02-325854C01 | ASSY-TOOL-TACH MOUNT-PLATE CLAMP | |
| 02-325855B01 | ASSY-TOOL-TACHOMETER | |
| 02-326260D01 | ASSY-ROTAMETER W/FLOAT LOCK | |
| 02-326489B01 | FEEDTHRU ROTARY ASSEMBLY | |
