| Part Number | Description | Add to Inquiry |
| 1070-291-01 | ASSY-QTZ TC SIDE/REAR 300MM OPR |  |
| 1070-292-01 | ASSY-QTZ TC FRONT/SIDE 300MM OPR | |
| 1144-940-01 | ASSY-300MM CENTER TC LOW MASS SUS | |
| 43-105310A23 | LAMP-SPOT 1KW 120V TUNGSTEN HALOGEN | |
| 1031-526-01 | PIN-QUARTZ SUPPORT GETTER SINGLE END | |
| 16-351160B01 | PIN-SUPPORT GETTER | |
| 1070-299-01 | SHELF-QUARTZ REAR SPLIT CHMBR OPR | |
| 60-122486A02 | O-RING 2-010/75D WHT-FLUOROCARBON | |
| 60-106206A96 | O-RING 2-014/75D WHT-FLUOROCARBON | |
| 1091-729-01 | O-RING 2-005/75D VITON | |
| 1151-682-01 | O-RING 2-025/75D BLACK VITON | |
| 1202-998-01 | CHAMBER-PROC RV SPLIT FLOW INTREPID ATM | |
| 16-188809D01 | CHAMBER-PRCS 300MM RP | |
| 1173-600-01 | CHAMBER-PRCS RV SPLIT FLOW INTREPID ATM | |
| 845000144 | TRANSMITTER TEMP TYPE R TRY~ASM60 | |
