| Part Number | Description | Add to Inquiry |
| 1133-728-01 | IGS Gas palel overhaul (XP8 QCM 製程 SiO) |  |
| 1139-860-01 | PCV Clamp | |
| 1160-029-01 | NW50 ROLLCAM GATE VAVLE ASSY | |
| 1162-853-01 | ASSY-RF COVER RC1 | |
| 1162-853-01R | RF cover RC1-CIP3 半月環 | |
| 1162-854-01 | ASSY-RF COVER RC2 | |
| 1170-006-01 | RF COVER/INNER A | |
| 1170-006-01R | RF cover RC2-CIP3 | |
| 1170-007-01 | RF COVER/INNER A RC2 | |
| 1170-007-01R | RF cover RC2-CIP3 | |
| 1170-624-01 | LINE-GAS-LS B | |
| 1184-959-01 | O-RING(FKM) V4640 D2770 G-300 | |
| 1184-962-01 | O-RING | |
| 1184-964-01 | O-RING(FKM) | |
| 1185-016-01 | O-RING KALREZ-9100 AS-264 | |
