| Part Number | Description | Add to Inquiry |
| 1100-070-01 | LINE-GAS-DRY B |  |
| 1105-658-01 | AS-382 KALREZ | |
| 1110-177-01 | ORIFICE / SHD | |
| 1124-947-01 | RF cover inner B1 | |
| 1124-948-01 | RF cover inner B2 | |
| 1129-830-01 | SUSCEPTOR-302/QCM-LT | |
| 1133-678-01 | RF cover inner c1 | |
| 1170-624-01 | LINE-GAS-LS B | |
| 1172-606-01 | SOCKET HEAD CAP SCREW ZrO2 M8*6 | |
| 1179-948-01 | SHOWER-PLATE | |
| 1203-490-01 | DISTRIBUTOR/ST/IG7.0/PG5 | |
| 2101-051014 | Susceptor align Pin | |
| 2101-051022 | center align Pin | |
| 9191-464222 | AS-318 KALREZ | |
| 9191-551002 | KFCTV050YC | |
