| Part Number | Description | Add to Inquiry |
| 830091238 | FREQ INV MM420 0.75kW 230V +BOP 82000143[A] |  |
| 1182-716-01 | N2 balance 10SLM | |
| 830064451 | TRANSD PRESS 627H 2TORR | |
| 2442612-01 | TANK TCF ASSEMBLY | |
| 2335298-01 | SEAL OMEGA FOUP DOOR | |
| 2310783-01 | Seal Omega Purge Door | |
| 2311313-01 | Seal Omega Cover Plate | |
| 2894165-21 | A412 Ratio control board | |
| 2811847-21 | PWBA DOOR MECHANISM CONNECT | |
| 2470934-01 | Retro elec PSU 31/33 | |
| 808006509 | SOCKET RELAY PYFZ-14-E | |
| 2419467-01 | A412 LPC doorplate ASSY BEARING/SEALS | |
| 2579510-01C | PVDF Valve Exhaust Body | |
| 2419459-01-R | ASSY DOORPLATE LPC/ROTATION REFURB (TEOS/SiN) | |
| 1118-669-01-r | BLOWER DN14-RD270-3C REPAIR | |
